variable-shaped electron-beam exposure installation
- variable-shaped electron-beam exposure installation
- eksponavimo įrenginys su keičiamu elektronų pluošto pavidalu
statusas T sritis radioelektronika
atitikmenys: angl. variable-shaped electron-beam exposure installation
vok. Flächenstrahlbelichtungsanlage, f
rus. установка электронно-лучевого экспонирования с электронным лучом изменяемой формы, f
pranc. installation d'exposition par faisceau d'électrons variable, f
Radioelektronikos terminų žodynas. – Vilnius : BĮ UAB „Litimo“.
Kazimieras Gaivenis, Gytis Juška, Vidas Kalesinskas.
2000.
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Flächenstrahlbelichtungsanlage — eksponavimo įrenginys su keičiamu elektronų pluošto pavidalu statusas T sritis radioelektronika atitikmenys: angl. variable shaped electron beam exposure installation vok. Flächenstrahlbelichtungsanlage, f rus. установка электронно лучевого… … Radioelektronikos terminų žodynas
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